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Rotary Vane Vacuum Pump

Complete Pump; 460 CFM. Equivalent to Busch RA-0630-C

Product Description

Complete Pump; 460 CFM. Equivalent to Busch RA-0630-C

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Veeco manufactures the Piezocon® Gas Concentration Sensors and Gas Mixing Systems for MOCVD and other applications.  Accurately monitors and controls the delivery of chemical precursor vapors and dopant gases in CVD and MOCVD process tools.
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